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10 items by relevance
1 Conference paper

Annealing and deposition effects on the chemical composition of silicon rich nitride

Andersen, Karin Nordström; Svendsen, Winnie Edith; Stimpel-Lindner, T.; Sulima, T.; Baumgärtner, H.; Philipp, H.

Proceedings of Kif and Dfs Annual Meeting — 2004

Year: 2004

Language: English

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2 Journal article

Annealing and deposition effects of the chemical composition of silicon rich nitride

Andersen, Karin Nordström; Svendsen, Winnie Edith; Stimpel-Lindner, T.; Sulima, T.; Baumgärtner, H.

Applied Surface Science — 2005, Volume 243, Issue 1-4, pp. 401-408

in optical waveguides. This means that the annealing temperature must be high enough to break the N-H bonds, but no so high as to produce clusters. Therefore, the process window for an annealing step lies between 1100 and 1150 oC. The chemical composition of amorphous silicon-rich nitride has been

Year: 2005

Language: English

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