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Boolean: (bicycle AND helmet) OR (head AND protection) (always group AND in parenthesis)
Title: title:(climate change)
Author: author:("bohr niels" OR "bohr n") (avoid only full first name)
Phrase: "water pump control" (does not work with wildcards)
Wildcards: wom?n pharm*

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Conference paper

Micro probee carrier profiling of Ultra-shallow structures in advanced materials

By Clarysse, T.; Moussa, A.; Parmentier, B.; Eyben, P.; Douhard, B.; Vandervorst, W.; Nielsen, P.F.; Lin, Rong1; Petersen, Dirch Hjorth1,2,3; Wang, Fei1,4,5; Hansen, Ole1,4,5 ...and 1 more

From

Department of Micro- and Nanotechnology, Technical University of Denmark1

Nanointegration Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2

NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark3

Silicon Microtechnology Group, MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark4

MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark5

Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark6

Center for Nanoteknologi, Centers, Technical University of Denmark7

Language: English
Year: 2010
Proceedings: 2010 MRS Spring Meeting & Exhibit
Types: Conference paper
ORCIDs: Petersen, Dirch Hjorth and Hansen, Ole

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