Journal article
Topology Optimization of Stressed Capacitive RF MEMS Switches
Geometry design can improve a capacitive radio-frequency microelectromechanical system switch's reliability by reducing the impacts of intrinsic biaxial stresses and stress gradients on the switch's membrane. Intrinsic biaxial stresses cause stress stiffening, whereas stress gradients cause out-of-plane curling.
We use topology optimization to systematically generate designs, by minimizing stress stiffening, minimizing curling, or minimizing stress stiffening while constraining the curling behavior. We present the corresponding problem formulations and sensitivity derivations and discuss the role of key elements in the problem formulation.
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2013 |
| Pages: | 206-215 |
| ISSN: | 19410158 and 10577157 |
| Types: | Journal article |
| DOI: | 10.1109/JMEMS.2012.2224640 |
| ORCIDs: | Sigmund, Ole |
Geometry design Intrinsic stress Mechanical design Radio-frequency microelectromechanical systems (RF MEMS) Stress gradient Topology optimization
Optimization Radio frequency Sensitivity Solids Stress Switches Topology capacitive radiofrequency microelectromechanical system switch reliability curling minimization geometry design intrinsic biaxial stresses intrinsic stress mechanical design microswitches radio-frequency microelectromechanical systems (RF MEMS) sensitivity derivations stress gradient stress gradients stress stiffening minimization stressed capacitive RF MEMS switches switch membrane topology optimization
