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Conference paper

Low-loss silicon rich silicon nitride waveguides for high density integrated optics

By Philipp, Hugh Taylor1; Andersen, Karin Nordström1; Svendsen, Winnie Edith2; Haiyan, Ou1

From

Department of Photonics Engineering, Technical University of Denmark1

Department of Micro- and Nanotechnology, Technical University of Denmark2

Language: English
Year: 2004
Proceedings: Integrated Photonics Research Conference 2004
Types: Conference paper
ORCIDs: Svendsen, Winnie Edith and Haiyan, Ou

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