Journal article
Fabrication of High-Frequency pMUT Arrays on Silicon Substrates
A novel technique based on silicon micromachining for fabrication of linear arrays of high-frequency piezoelectric micromachined ultrasound transducers (pMUT) is presented. Piezoelectric elements are formed by deposition of lead zirconia titanate into etched features of a silicon substrate such that the depth of these features determine the element thickness and hence the resonance frequency.
The process leaves a near planar surface which is ideal for further wafer level processing such as top electrode and interconnect formation. A fabricated element is characterized by pulse echo response.
| Language: | English |
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| Publisher: | IEEE |
| Year: | 2010 |
| Pages: | 1470-1477 |
| ISSN: | 15258955 and 08853010 |
| Types: | Journal article |
| DOI: | 10.1109/TUFFC.2010.1566 |
| ORCIDs: | Pedersen, Thomas and Thomsen, Erik Vilain |
High-frequency effects Micromachining Piezoelectric transducers Ultrasonic imaging Ultrasonic transducer arrays
Etching Fabrication Lead Silicon Titanium compounds Ultrasonic transducers electrodes etching high-frequency effects high-frequency pMUT arrays high-frequency piezoelectric micromachined ultrasound transducers interconnect formation micromachining piezoelectric transducers pulse echo response resonance frequency ultrasonic imaging ultrasonic transducer arrays
