Journal article
Enhanced functionality of cantilever based mass sensors using higher modes
Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark1
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Micro- and Nanotechnology, Technical University of Denmark3
Nano-Bio Integrated Systems Group, Biomedical Micro Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark4
Biomedical Micro Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark5
By positioning a single gold particle at different locations along the length axis on a cantilever based mass sensor, we have investigated the effect of mass position on the mass responsivity and compared the results to simulations. A significant improvement in quality factor and responsivity was achieved by operating the cantilever in the fourth bending mode thereby increasing the intrinsic sensitivity.
It is shown that the use of higher bending modes grants a spatial resolution and thereby enhances the functionality of the cantilever based mass sensor. (c) 2005 American Institute of Physics.
| Language: | English |
|---|---|
| Publisher: | American Institute of Physics |
| Year: | 2005 |
| ISSN: | 10773118 and 00036951 |
| Types: | Journal article |
| DOI: | 10.1063/1.1948521 |
| ORCIDs: | Svendsen, Winnie Edith and Boisen, Anja |
