Journal article · Conference paper
Topas Based Lab-on-a-chip Microsystems Fabricated by Thermal Nanoimprint Lithography
Lab-on-a-Chip, Department of Micro- and Nanotechnology, Technical University of Denmark1
Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Chemical and Biochemical Engineering, Technical University of Denmark3
The Danish Polymer Centre, Department of Chemical and Biochemical Engineering, Technical University of Denmark4
We, present a one-step technology for fabrication of Topas-based lab-on-a-chip (LOC) microsysterris by the use of thermal nanoimprint lithography (NIL). The technology is demonstrated by the fabrication of two working devices: a particle separator and a LOC with integrated optics for absorbance measurements.
These applications demonstrate the fabrication of millimeter to micrometer-sized structures in one lithographic step. The use of NIL makes the technology easily scalable into the nanometer regime by the use of a suitable lithographic technique in the fabrication of the stamp. Processing issues such as environmental stress cracking of the Topas and the requirements to anti-sticking layers on the stamp when imprinting into Topas are discussed.
| Language: | English |
|---|---|
| Publisher: | American Vacuum Society |
| Year: | 2005 |
| Pages: | 2944-2949 |
| Proceedings: | 49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication |
| ISSN: | 15208567 , 10711023 , 0734211x , 21662754 and 21662746 |
| Types: | Journal article and Conference paper |
| DOI: | 10.1116/1.2091089 |
| ORCIDs: | Szabo, Peter and Kristensen, Anders |
