Journal article
All-silica nanofluidic devices for DNA-analysis fabricated by imprint of sol-gel silica with silicon stamp
We present a simple and cheap method for fabrication of silica nanofluidic devices for single-molecule studies. By imprinting sol-gel materials with a multi-level stamp comprising micro- and nanofeatures, channels of different depth are produced in a single process step. Calcination of the imprinted hybrid sol-gel material produces purely inorganic silica, which has very low autofluorescence and can be fusion bonded to a glass lid.
Compared to top-down processing of fused silica or silicon substrates, imprint of sol-gel silica enables fabrication of high-quality nanofluidic devices without expensive high-vacuum lithography and etching techniques. The applicability of the fabricated device for single-molecule studies is demonstrated by measuring the extension of DNA molecules of different lengths confined in the nanochannels.
Language: | English |
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Publisher: | The Royal Society of Chemistry |
Year: | 2011 |
Pages: | 262-267 |
ISSN: | 14730189 and 14730197 |
Types: | Journal article |
DOI: | 10.1039/c1lc20689c |
ORCIDs: | Marie, Rodolphe and Kristensen, Anders |