Journal article
Spatial characterization of nanotextured surfaces by visual color imaging
Department of Micro- and Nanotechnology, Technical University of Denmark1
Polymer Micro & Nano Engineering, Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Photonics Engineering, Technical University of Denmark3
Optical Microsensors and Micromaterials, Department of Photonics Engineering, Technical University of Denmark4
DFM - Dansk Fundamental Metrologi A/S5
We present a method using an ordinary color camera to characterize nanostructures from the visual color of the structures. The method provides a macroscale overview image from which micrometer-sized regions can be analyzed independently, hereby revealing long-range spatial variations of the structures.
The method is tested on injection-molded polymer line gratings, and the height and filling factor are determined with confidence intervals similar to more advanced imaging scatterometry setups.
Language: | English |
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Year: | 2016 |
Pages: | 9719-9723 |
ISSN: | 15394522 , 00036935 and 1559128x |
Types: | Journal article |
DOI: | 10.1364/AO.55.009719 |
ORCIDs: | Feidenhans'l, Nikolaj Agentoft and Taboryski, Rafael J. |