Journal article
Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry
Department of Micro- and Nanotechnology, Technical University of Denmark1
Nano-Bio Integrated Systems Group, Biomedical Micro Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
Biomedical Micro Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark3
Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark4
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark5
Nanomechanical resonators have been monolithically integrated on preprocessed complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems have been designed to have resonance frequencies up to 1.5 MHz. The systems have been characterized in ambient air and vacuum conditions and display ultrasensitive mass detection in air.
A mass sensitivity of 4 ag/Hz has been determined in air by placing a single glycerine drop, having a measured weight of 57 fg, at the apex of a cantilever and subsequently measuring a frequency shift of 14.8 kHz. CMOS integration enables electrostatic excitation, capacitive detection, and amplification of the resonance signal directly on the chip. (c) 2005 American Institute of Physics.
| Language: | English |
|---|---|
| Publisher: | American Institute of Physics |
| Year: | 2005 |
| ISSN: | 10773118 and 00036951 |
| Types: | Journal article |
| DOI: | 10.1063/1.1999838 |
| ORCIDs: | Svendsen, Winnie Edith and Boisen, Anja |
