Journal article
Optimizing silver-capped silicon nanopillars to simultaneously realize macroscopic, practical-level SERS signal reproducibility and high enhancement at low costs
Department of Micro- and Nanotechnology, Technical University of Denmark1
Nanoprobes, Department of Micro- and Nanotechnology, Technical University of Denmark2
Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, Department of Health Technology, Technical University of Denmark3
The ideal surface-enhanced Raman spectroscopy (SERS) substrate should fulfil the following: (a) predictable SERS enhancement, (b) macroscale SERS signal uniformity, and (c) suitability for mass production at low costs. Macroscale SERS uniformity and reproducibility at practical levels are big obstacles, which have been preventing most SERS substrates from reliable sensing applications.
We have previously shown that SERS-active nanopillar structures, fabricated by lithography-free processes, exhibit high average SERS enhancements and are mass producible. Here, we report an optimized process and show that the improved structures exhibit unrivalled macroscale SERS uniformities (RSD: ∼2.5% in millimeter scale, ∼7% in wafer scale) and reproducibility (RSD: ∼1.5% across 3 wafers), while at the same time exhibiting a very large average SERS enhancement factor of >108.
The obtained SERS uniformity (~2.5% RSD in millimeter scale) is the best to date measured on large-area solid SERS substrates. Fast and reproducible SERS analysis of trans-1,2-bis (4-pyridyl) ethylene down to 4x10-13 mol is demonstrated using the optimized structures. We emphasize that achieving simultaneously macroscopic, practical-level SERS signal reproducibility and high enhancement via a lithography-free process is a notable advance towards industrialization of substrate-based SERS sensors.
Language: | English |
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Year: | 2017 |
Pages: | 1808-1818 |
ISSN: | 10974555 and 03770486 |
Types: | Journal article |
DOI: | 10.1002/jrs.5255 |
ORCIDs: | Wu, Kaiyu , Rindzevicius, Tomas and Boisen, Anja |