Journal article
Quality factors of nonideal micro pillars
The influence of fabrication-induced imperfections and material absorption on the quality (Q) factor of a microcavity pillar is studied numerically. The dependence on sidewall inclination, selective underetch, and intrinsic loss is quantified. The authors show that imperfections can lead to an improvement in Q and that a sidewall inclination angle of less than 1° causes a dramatic change in the Q factor.
The variations in Q can be attributed to a delicate balance between effective index contrasts, mode overlap, and higher-order mode contributions.
Language: | English |
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Publisher: | American Institute of Physics |
Year: | 2007 |
Pages: | 011116 |
ISSN: | 10773118 and 00036951 |
Types: | Journal article |
DOI: | 10.1063/1.2751586 |
ORCIDs: | Gregersen, Niels and Mørk, Jesper |