Journal article
Visualization of the sheath-lens focusing effect to disk and square electrodes
The property of the sheath evolving to one-side biased electrodes to focus in a discrete manner the positive ions to distinct regions on the surface is demonstrated both theoretically and experimentally. Positive ion trajectories to disk and square electrodes are obtained by solving in three dimensions the Poisson equation.
The related ion flux is found to be in excellent agreement with the experimental ion flux developed by exposing the electrodes in Ar plasma.
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2005 |
| Pages: | 534,535 |
| ISSN: | 19399375 and 00933813 |
| Types: | Journal article |
| DOI: | 10.1109/TPS.2005.845127 |
Ar Ar plasma Argon Electrodes Focusing effect Plasma diagnostics Plasma measurements Plasma sheaths Poisson equations Pollution measurement Surface contamination Thickness measurement Visualization argon disk electrode electrodes ion flux ion kinetic one-sided biased electrodes plasma diagnostics plasma sheath plasma sheaths plasma simulation plasma transport processes positive ion trajectories sheath-lens focusing effect square electrode three-dimensional Poisson equation
