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Journal article

Convenient contrast enhancement by a hole-free phase plate

From

National Institute of Nanotechnology1

Center for Electron Nanoscopy, Technical University of Denmark2

JEOL Ltd.3

Decrease of the irradiation dose needed to obtain a desired signal-to-noise ratio can be achieved by Zernike phase-plate imaging. Here we present results on a hole-free phase plate (HFPP) design that uses the incident electron beam to define the center of the plate, thereby eliminating the need for high precision alignment and with advantages in terms of ease of fabrication.

The Zernike-like phase shift is provided by a charge distribution induced by the primary beam, rather than by a hole in the film. Compared to bright-field Fresnel-mode imaging, the hole-free phase plate (HFPP) results in two- to four-fold increase in contrast, leading to a corresponding decrease in the irradiation dose required to obtain a desired signal-to-noise ratio.

A local potential distribution, developed due to electron beam-induced secondary-electron emission, is the most likely mechanism responsible for the contrast-transfer properties of the HFPP.

Language: English
Year: 2012
Pages: 77-89
ISSN: 18792723 and 03043991
Types: Journal article
DOI: 10.1016/j.ultramic.2012.02.004
ORCIDs: Beleggia, Marco

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