Journal article
Enhanced electro-mechanical coupling of TiN/Ce0.8Gd0.2O1.9 thin film electrostrictor
Gadolium doped ceria, Gd:CeO2 (CGO), have recently been shown to possess an exceptional high electrostriction coefficient (Q), which is at the least three orders of magnitude larger than the best performing lead-based electrostrictors, e.g. Pb(Mn1/3Nb2/3)O3. Herein, we show that CGO thin films fabricated by a pulsed laser deposition method can be directly integrated onto the Si substrate by using TiN films of few nanometers as functional electrodes.
The exceptional good coupling between TiN and Ce0.8Gd0.2O1.9 yields a high electrostriction coefficient of Qe = 40 m4 Cā2 and a superior electrochemomechanical stability with respect to the metal electrodes.
Language: | English |
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Publisher: | AIP Publishing LLC |
Year: | 2019 |
Pages: | 071104 |
ISSN: | 2166532x |
Types: | Journal article |
DOI: | 10.1063/1.5091735 |
ORCIDs: | Santucci, Simone , Pryds, Nini , Esposito, Vincenzo , 0000-0003-4354-3948 and 0000-0002-9206-9421 |