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10 items by relevance
1 Journal article

Wafer-scale fabrication of polymer distributed feedback lasers

Christiansen, Mads Brøkner; Schøler, Mikkel; Balslev, Søren; Nielsen, Rasmus Bundgaard; Petersen, Dirch Hjorth; Kristensen, Anders

Journal of Vacuum Science and Technology B — 2006, Volume 24, Issue 6, pp. 3252-3257

The authors demonstrate wafer-scale, parallel process fabrication of distributed feedback (DFB) polymer dye lasers by two different nanoimprint techniques: By thermal nanoimprint lithography (TNIL) in polymethyl methacrylate and by combined nanoimprint and photolithography (CNP) in SU-8. In both

Year: 2006

Language: English

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2 Journal article

Wafer-scale fabrication of polymer distributed feedback lasers

Christiansen, M. B.; Schøler, M.; Balslev, S.; Nielsen, R. B.; Petersen, D. H.; Kristensen, A.

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena — 2006, Volume 24, Issue 6, pp. 3252-3257

The authors demonstrate wafer-scale, parallel process fabrication of distributed feedback (DFB) polymer dye lasers by two different nanoimprint techniques: By thermal nanoimprint lithography (TNIL) in polymethyl methacrylate and by combined nanoimprint and photolithography (CNP) in SU-8. In both

Year: 2006

Language: Undetermined

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klhbmfengij oa cdp

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