Journal article
Static Contact Micro Four-Point Probes with <11 nm positioning repeatability
Nanointegration Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark1
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Micro- and Nanotechnology, Technical University of Denmark3
Silicon Microtechnology Group, MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark4
MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark5
Department of Physics, Technical University of Denmark6
In recent years micro four-point probes (M4PP) have proved a powerful tool for electrical characterization of thin film due to a high surface sensitivity and spatial resolution. However, a common problem is the probe lifetime which is limited mainly due to mechanical wear of the electrode material on the cantilever tips.
In this paper we present a three-way flexible M4PP that enables static contact upon surface contact. We experimentally demonstrate that the static contact results in little or no frictional wear of the electrode material. In addition we investigate the repeatability of the effective spatial electrode position and find that the standard deviation of each electrode position is more than one order of magnitude smaller than the length scale of the tip contact area.
Language: | English |
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Year: | 2008 |
Pages: | 1092-1095 |
ISSN: | 18735568 and 01679317 |
Types: | Journal article |
DOI: | 10.1016/j.mee.2007.12.077 |
ORCIDs: | Petersen, Dirch Hjorth , Hansen, Ole and Bøggild, Peter |