Journal article
Hot embossing of photonic crystal polymer structures with a high aspect ratio
Karlsruhe Institute of Technology1
NSE-Optofluidics Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark3
Department of Micro- and Nanotechnology, Technical University of Denmark4
Hot embossing is a promising approach for mass production of photonic crystal structures. This paper describes the fabrication of a replication tool for two-dimensional photonic crystal patterns and its replication in substrates of poly(methylmethacrylate) (PMMA) and cyclic olefin copolymer (COC). A nickel tool for the replication of structures with lateral dimensions of 110 nm and heights of approximately 370 nm is fabricated via electroplating of a nanostructured sample resulting in an aspect ratio of approximately 3.5.
The structures are subsequently hot embossed into PMMA and COC substrates.
| Language: | English |
|---|---|
| Year: | 2011 |
| Pages: | 025017 |
| ISSN: | 13616439 and 09601317 |
| Types: | Journal article |
| DOI: | 10.1088/0960-1317/21/2/025017 |
| ORCIDs: | Vannahme, Christoph |
