Journal article
Graphene Conductance Uniformity Mapping
Department of Photonics Engineering, Technical University of Denmark1
Silicon Microtechnology, Department of Micro- and Nanotechnology, Technical University of Denmark2
Teraherts Technologies and Biophotonics, Department of Photonics Engineering, Technical University of Denmark3
Department of Micro- and Nanotechnology, Technical University of Denmark4
Nanointegration, Department of Micro- and Nanotechnology, Technical University of Denmark5
McGill University6
Chalmers University of Technology7
Nanocarbon, Department of Micro- and Nanotechnology, Technical University of Denmark8
CAPRES A/S9
Surface Physics and Catalysis, Department of Physics, Technical University of Denmark10
...and 0 moreWe demonstrate a combination of micro four-point probe (M4PP) and non-contact terahertz time-domain spectroscopy (THz-TDS) measurements for centimeter scale quantitative mapping of the sheet conductance of large area chemical vapor deposited graphene films. Dual configuration M4PP measurements, demonstrated on graphene for the first time, provide valuable statistical insight into the influence of microscale defects on the conductance, while THz-TDS has potential as a fast, non-contact metrology method for mapping of the spatially averaged nanoscopic conductance on wafer-scale graphene with scan times of less than a minute for a 4-in. wafer.
The combination of M4PP and THz-TDS conductance measurements, supported by micro Raman spectroscopy and optical imaging, reveals that the film is electrically continuous on the nanoscopic scale with microscopic defects likely originating from the transfer process, dominating the microscale conductance of the investigated graphene film.
| Language: | English |
|---|---|
| Year: | 2012 |
| Pages: | 5074-5081 |
| ISSN: | 15306992 and 15306984 |
| Types: | Journal article |
| DOI: | 10.1021/nl301551a |
| ORCIDs: | Petersen, Dirch Hjorth , Bøggild, Peter , Hansen, Ole and Jepsen, Peter Uhd |
