Journal article
Thermoplastic microcantilevers fabricated by nanoimprint lithography
Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark1
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Micro- and Nanotechnology, Technical University of Denmark3
NSE-Optofluidics Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark4
Nanophotonic Devices, Department of Photonics Engineering, Technical University of Denmark5
Department of Photonics Engineering, Technical University of Denmark6
Quantum and Laser Photonics, Department of Photonics Engineering, Technical University of Denmark7
University of California at Berkeley8
Nanoimprint lithography has been exploited to fabricate micrometre-sized cantilevers in thermoplastic. This technique allows for very well defined microcantilevers and gives the possibility of embedding structures into the cantilever surface. The microcantilevers are fabricated in TOPAS and are up to 500 μm long, 100 μm wide, and 4.5 μm thick.
Some of the cantilevers have built-in ripple surface structures with heights of 800 nm and pitches of 4 μm. The yield for the cantilever fabrication is 95% and the initial out-of-plane bending is below 10 μm. The stiffness of the cantilevers is measured by deflecting the cantilever with a well-characterized AFM probe.
An average stiffness of 61.3 mN m−1 is found. Preliminary tests with water vapour indicate that the microcantilevers can be used directly for vapour sensing applications and illustrate the influence of surface structuring of the cantilevers.
Language: | English |
---|---|
Year: | 2010 |
Pages: | 015009 |
ISSN: | 13616439 and 09601317 |
Types: | Journal article |
DOI: | 10.1088/0960-1317/20/1/015009 |
ORCIDs: | Keller, Stephan Urs , Kristensen, Anders , Yvind, Kresten , Hvam, Jørn Märcher and Boisen, Anja |