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Journal article

Ultrasensitive string-based temperature sensors

From

Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark1

NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2

Department of Micro- and Nanotechnology, Technical University of Denmark3

VTT Technical Research Centre of Finland Ltd.4

Nokia Research Center5

Resonant strings are a promising concept for ultra sensitive temperature detection. We present an analytical model for the sensitivity with which we optimize the temperature response of resonant strings by varying geometry and material. The temperature sensitivity of silicon nitride and aluminum microstrings was measured.

The relative change in resonant frequency per temperature change of -1.74 +/- 0.04%/ degrees C of the aluminum strings is more than one order of magnitude higher than of the silicon nitride strings and of comparable state-of-the-art AuPd strings.

Language: English
Publisher: American Institute of Physics
Year: 2011
ISSN: 10773118 and 00036951
Types: Journal article
DOI: 10.1063/1.3567012
ORCIDs: Schmid, Silvan and Boisen, Anja

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