Journal article
Ultrasensitive string-based temperature sensors
Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark1
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Micro- and Nanotechnology, Technical University of Denmark3
VTT Technical Research Centre of Finland Ltd.4
Nokia Research Center5
Resonant strings are a promising concept for ultra sensitive temperature detection. We present an analytical model for the sensitivity with which we optimize the temperature response of resonant strings by varying geometry and material. The temperature sensitivity of silicon nitride and aluminum microstrings was measured.
The relative change in resonant frequency per temperature change of -1.74 +/- 0.04%/ degrees C of the aluminum strings is more than one order of magnitude higher than of the silicon nitride strings and of comparable state-of-the-art AuPd strings.
Language: | English |
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Publisher: | American Institute of Physics |
Year: | 2011 |
ISSN: | 10773118 and 00036951 |
Types: | Journal article |
DOI: | 10.1063/1.3567012 |
ORCIDs: | Schmid, Silvan and Boisen, Anja |