Journal article
All-Optical Frequency Modulated High Pressure MEMS Sensor for Remote and Distributed Sensing
Department of Micro- and Nanotechnology, Technical University of Denmark1
MEMS-AppliedSensors Group, MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark3
Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark4
We present the design, fabrication and characterization of a new all-optical frequency modulated pressure sensor. Using the tangential strain in a circular membrane, a waveguide with an integrated nanoscale Bragg grating is strained longitudinally proportional to the applied pressure causing a shift in the Bragg wavelength.
The simple and robust design combined with the small chip area of 1 × 1.8 mm2 makes the sensor ideally suited for remote and distributed sensing in harsh environments and where miniaturized sensors are required. The sensor is designed for high pressure applications up to 350 bar and with a sensitivity of 4.8 pm/bar (i.e., 350 ×105 Pa and 4.8 × 10−5 pm/Pa, respectively).
| Language: | English |
|---|---|
| Publisher: | Molecular Diversity Preservation International (MDPI) |
| Year: | 2011 |
| Pages: | 10615-10623 |
| ISSN: | 14243210 and 14248220 |
| Types: | Journal article |
| DOI: | 10.3390/s111110615 |
| ORCIDs: | Thomsen, Erik Vilain and Hansen, Ole |
