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Journal article

Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures

By Ou, Yiyu1; Zhu, Xiaolong1,2; Jokubavicius, Valdas3; Yakimova, Rosita3; Mortensen, N. Asger1,2; Syväjärvi, Mikael3; Xiao, Sanshui1,2; Ou, Haiyan1,4

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Department of Photonics Engineering, Technical University of Denmark1

Structured Electromagnetic Materials, Department of Photonics Engineering, Technical University of Denmark2

Linköping University3

Diode Lasers and LED Systems, Department of Photonics Engineering, Technical University of Denmark4

We demonstrate a time-efficient and low-cost approach to fabricate Si3N4 coated nanodome structures in fluorescent SiC. Nanosphere lithography is used as the nanopatterning method and SiC nanodome structures with Si3N4 coating are formed via dry etching and thin film deposition process. By using this method, a significant broadband surface antireflection and a considerable omnidirectional luminescence enhancement are obtained.

The experimental observations are then supported by numerical simulations. It is believed that our fabrication method will be well suitable for large-scale production in the future.

Language: English
Publisher: Nature Publishing Group
Year: 2014
Pages: 1-4
ISSN: 20452322
Types: Journal article
DOI: 10.1038/srep04662
ORCIDs: Ou, Yiyu , Zhu, Xiaolong , Mortensen, N. Asger , Xiao, Sanshui and Ou, Haiyan

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