Journal article
Fabrication of fully suspended pyrolytic carbon string resonators for characterization of drug nano- and microparticles
Biomaterial Microsystems, Nanofabrication, National Centre for Nano Fabrication and Characterization, Technical University of Denmark1
Nanofabrication, National Centre for Nano Fabrication and Characterization, Technical University of Denmark2
National Centre for Nano Fabrication and Characterization, Technical University of Denmark3
Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, Department of Health Technology, Technical University of Denmark4
Nanoprobes, Drug Delivery and Sensing, Department of Health Technology, Technical University of Denmark5
Drug Delivery and Sensing, Department of Health Technology, Technical University of Denmark6
Department of Health Technology, Technical University of Denmark7
Pyrolytic carbon is a promising material for fabrication of micro- and nanomechanical sensors due to thepossibility to control both structural parameters and properties such as resonance frequency, residualstress and electrical conductivity. Here, we present a novel fabrication process for pyrolytic carbon stringresonators suspended over a through-wafer-orifice.
The pyrolytic carbon string resonators had a length of400 μm, a width of 30 μm and a thickness of 700 nm. The string resonators were applied for characterization of nano- and microparticulate drug formulations using two different modes of operation. First, mass-sensing on nanograms of nebulized or spray coated paracetamol micro- and nanoparticles was demon-strated.
Then, absorption spectra of the drug were obtained by nanomechanical infrared spectroscopy(NAM-IR). Finally, an efficient method for in situ regeneration of the sensor was demonstrated.
Language: | English |
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Year: | 2019 |
Pages: | 194-203 |
ISSN: | 18733069 and 09244247 |
Types: | Journal article |
DOI: | 10.1016/j.sna.2019.02.002 |
ORCIDs: | 0000-0003-3576-9277 , Boisen, Anja and Keller, Stephan Sylvest |