Conference paper · Journal article
Preliminary Performance Evaluation of MEMS-based Piezoelectric Energy Harvesters in Extended Temperature Range
Meggitt A/S1
Department of Micro- and Nanotechnology, Technical University of Denmark2
MEMS-AppliedSensors, Department of Micro- and Nanotechnology, Technical University of Denmark3
Surface Physics and Catalysis, Department of Physics, Technical University of Denmark4
Silicon Microtechnology, Department of Micro- and Nanotechnology, Technical University of Denmark5
In this work a batch of MEMS-based vibration energy harvesters consisting of a silicon/PZT thick film ntilever with integrated proof mass is characterized. The purpose of a vibration energy harvester is to convert low grade vibrations to useful electrical power. Optimally, the natural frequency of the harvester should match the frequency of he ambient vibration.
The first step to achieve this is to evaluate the uniformity of the fabricated harvesters and nderstand the effects of temperature on the harvesters during operation. Therefore, the uniformity of 40 energy harvesters from one wafer has been evaluated. Thereafter the performance of the energy harvesters operating at emperatures between -30°C to 100°C was measured.
| Language: | English |
|---|---|
| Year: | 2012 |
| Pages: | 1434-1437 |
| Proceedings: | Eurosensors 2012 |
| ISSN: | 18777058 |
| Types: | Conference paper and Journal article |
| DOI: | 10.1016/j.proeng.2012.09.427 |
| ORCIDs: | Lei, A. , Hansen, Ole and Thomsen, E.V. |
