Pulse mode readout of MEMS bulk disk resonator based mass sensor

We propose a pulse excitation setup applied on a Micro-Electro-Mechanical bulk disk resonator aimed for mass detection. This scheme offers measuring not only the resonant frequency, which defines the mass change, but also the quality factor and the feedthrough/parasitic capacitance of the disk which can provide information about the environment.

This technique is independent of the parallel capacitor which generates an extra anti-resonance during the conventional frequency response measurement method. Furthermore, it also permits exciting resonators with different resonant frequencies with a unique input signal within a range of 300kHz. In addition, the readout method is high speed with no complicated feedback configuration.

Here we present a full electro-mechanical model, predicting the behavior of the disk, and the model is verified by the experimental results.