Journal article ยท Preprint article
An Astigmatic Detection System for Polymeric Cantilever-based Sensors
We demonstrate the use of an astigmatic detection system (ADS) for resonance frequency identification of polymer microcantilever sensors. The ADS technology is based on a DVD optical head combined with an optical microscope (OM). The optical head has a signal bandwidth of 80 MHz, allowing thermal fluctuation measurements on cantilever beams with a subnanometer resolution.
Furthermore, an external excitation can intensify the resonance amplitude, enhancing the signal- to-noise ratio. The full width at half maximum (FWHM) of the laser spot is 568 nm, which facilitates read-out on potentially submicrometer-sized cantilevers. The resonant frequency of SU-8 microcantilevers is measured by both thermal fluctuation and excited vibration measurement modes of the ADS.
Language: | English |
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Publisher: | Journal of Sensors |
Year: | 2012 |
Pages: | 1-7 |
ISSN: | 16877268 and 1687725x |
Types: | Journal article and Preprint article |
DOI: | 10.1155/2012/580939 |
ORCIDs: | Keller, Stephan Sylvest and Boisen, Anja |