Journal article
Probing the Gas-Phase Dynamics of Graphene Chemical Vapour Deposition using in-situ UV Absorption Spectroscopy
Department of Micro- and Nanotechnology, Technical University of Denmark1
Nanocarbon, Department of Micro- and Nanotechnology, Technical University of Denmark2
Surface Physics and Catalysis, Department of Physics, Technical University of Denmark3
Silicon Microtechnology, Department of Micro- and Nanotechnology, Technical University of Denmark4
Center for Nanostructured Graphene, Centers, Technical University of Denmark5
The processes governing multilayer nucleation in the chemical vapour deposition (CVD) of graphene are important for obtaining high-quality monolayer sheets, but remain poorly understood. Here we show that higher-order carbon species in the gas-phase play a major role in multilayer nucleation, through the use of in-situ ultraviolet (UV) absorption spectroscopy.
These species are the volatilized products of reactions between hydrogen and carbon contaminants that have backstreamed into the reaction chamber from downstream system components. Consequently, we observe a dramatic suppression of multilayer nucleation when backstreaming is suppressed. These results point to an important and previously undescribed mechanism for multilayer nucleation, wherein higher-order gas-phase carbon species play an integral role.
Our work highlights the importance of gas-phase dynamics in understanding the overall mechanism of graphene growth.
| Language: | English |
|---|---|
| Publisher: | Nature Publishing Group UK |
| Year: | 2017 |
| Pages: | 6183 |
| ISSN: | 20452322 |
| Types: | Journal article |
| DOI: | 10.1038/s41598-017-06276-y |
| ORCIDs: | Shivayogimath, Abhay , Hansen, Ole , Bøggild, Peter , Booth, Tim and 0000-0003-1114-2955 |
