Journal article
Silicon waveguides produced by wafer bonding
Abstract
X-ray waveguides are successfully produced employing standard silicon technology of UV photolithography and wafer bonding. Contrary to theoretical expectations for similar systems even 100 mu m broad guides of less than 80 nm height do not collapse and can be used as one dimensional waveguides to excite single guided modes at typical x-ray energies.
| Language: | English |
|---|---|
| Publisher: | American Institute of Physics |
| Year: | 2005 |
| ISSN: | 10773118 and 00036951 |
| Types: | Journal article |
| DOI: | 10.1063/1.2158028 |
| ORCIDs: | Jensen, Flemming |
