Journal article
Sub-µm structured lotus surfaces manufacturing
Forschungs Zentrum Karlsruhe GmbH1
Karlsruhe Institute of Technology2
Manufacturing Engineering, Department of Mechanical Engineering, Technical University of Denmark3
Department of Mechanical Engineering, Technical University of Denmark4
University of Freiburg5
French Alternative Energies and Atomic Energy Commission6
Sub-lm structured surfaces allow modifying the behavior of polymer films or components. Especially in micro-fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g., with gradients).
In this paper we present the process chain to realize polymer sub-lm structures with minimum lateral feature size of 400 nm and up to 4 lm high.
Language: | English |
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Publisher: | Springer-Verlag |
Year: | 2009 |
Pages: | 1327-1333 |
Journal subtitle: | Micro- and Nanosystems Information Storage and Processing Systems |
ISSN: | 14321858 and 09467076 |
Types: | Journal article |
DOI: | 10.1007/s00542-008-0744-7 |
ORCIDs: | Tosello, Guido and Hansen, Hans Nørgaard |