Journal article
Imposed quasi-layer-by-layer homoepitaxial growth of SrTiO3 films by large area pulsed laser deposition
Thermo Ceramics, Fuel Cells and Solid State Chemistry Division, Risø National Laboratory for Sustainable Energy, Technical University of Denmark1
Fuel Cells and Solid State Chemistry Division, Risø National Laboratory for Sustainable Energy, Technical University of Denmark2
Risø National Laboratory for Sustainable Energy, Technical University of Denmark3
The homoepitaxial growth of SrTiO3 (STO) films was investigated by a large-area pulsed laser deposition (PLD), which was in-situ monitored by a high pressure reflective high energy electron diffraction. By combining a conventionally continuous film deposition with a followed interval relaxation, a persistent layer-by-layer (LBL) film growth of more than 100 unit cells STO films was achieved.
This interrupted PLD technique could realize persistent LBL film growth at any laser frequency between 1 and 10 Hz and provides an effective way to fabricate high quality complex oxide films on unit cell scale.
| Language: | English |
|---|---|
| Year: | 2011 |
| Pages: | 6330-6333 |
| ISSN: | 18792731 and 00406090 |
| Types: | Journal article |
| DOI: | 10.1016/j.tsf.2011.04.023 |
| ORCIDs: | Chen, Yunzhong and Pryds, Nini |
