Journal article
Anti-stiction coating of PDMS moulds for rapid microchannel fabrication by double replica moulding
In this paper, we report a simple and precise method to rapidly replicate master structures for fast microchannel fabrication by double replica moulding of polydimethylsiloxane (PDMS). A PDMS mould was surface-treated by vapour phase deposition of 1H,1H,2H,2H-perfluorodecyltrichlorosilane (FDTS), which resulted in an anti-stiction layer for the improved release after PDMS casting.
The deposition of FDTS on an O2 plasma-activated surface of PDMS produced a reproducible and well-performing anti-stiction monolayer of fluorocarbon, and we used the FDTS-coated moulds as micro-masters for rapid replication of micro-structures, avoiding the necessity to have to use other, more costly and fragile master materials.
Our protocol has been shown to reliably fabricate PDMS-based microfluidic devices in a low-cost and efficient manner. The replicas were further employed as micro-contract stamps to fabricate polymer-based waveguides.
Language: | English |
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Year: | 2011 |
Pages: | 105020 |
ISSN: | 13616439 and 09601317 |
Types: | Journal article |
DOI: | 10.1088/0960-1317/21/10/105020 |