Journal article
High-quality factor, high-confinement microring resonators in 4H-silicon carbide-on-insulator
Department of Photonics Engineering, Technical University of Denmark1
University of Copenhagen2
Nanophotonic Devices, Department of Photonics Engineering, Technical University of Denmark3
Diode Lasers and LED Systems, Department of Photonics Engineering, Technical University of Denmark4
Centre of Excellence for Silicon Photonics for Optical Communications, Centers, Technical University of Denmark5
Chinese Academy of Sciences6
Nanofabrication, National Centre for Nano Fabrication and Characterization, Technical University of Denmark7
Advanced Nanomachining, Nanofabrication, National Centre for Nano Fabrication and Characterization, Technical University of Denmark8
National Centre for Nano Fabrication and Characterization, Technical University of Denmark9
Fiber Optics, Devices and Non-linear Effects, Department of Photonics Engineering, Technical University of Denmark10
...and 0 moreSilicon carbide (SiC) exhibits promising material properties for nonlinear integrated optics. We report on a SiC-on-insulator platform based on crystalline 4H-SiC and demonstrate high-confinement SiC microring resonators with sub-micron waveguide cross-sectional dimensions. The Q factor of SiC microring resonators in such a sub-micron waveguide dimension is improved by a factor of six after surface roughness reduction by applying a wet oxidation process.
We achieve a high Q factor (73,000) for such devices and show engineerable dispersion from normal to anomalous dispersion by controlling the waveguide cross-sectional dimension, which paves the way toward nonlinear applications in SiC microring resonators.
| Language: | English |
|---|---|
| Year: | 2019 |
| Pages: | 13053-13060 |
| ISSN: | 10944087 |
| Types: | Journal article |
| DOI: | 10.1364/OE.27.013053 |
| ORCIDs: | Pu, Minhao , Chang, Bingdong , Ou, Haiyan , 0000-0003-0163-9255 , 0000-0003-1409-6974 and 0000-0003-2739-9544 |
