Journal article
Factors controlling the microstructure of Ce0.9Gd0.1O2-δ films in pulsed laser deposition process
Electroceramics, Fuel Cells and Solid State Chemistry Division, Risø National Laboratory for Sustainable Energy, Technical University of Denmark1
Fuel Cells and Solid State Chemistry Division, Risø National Laboratory for Sustainable Energy, Technical University of Denmark2
Risø National Laboratory for Sustainable Energy, Technical University of Denmark3
Paul Scherrer Institute4
Thermo Ceramics, Fuel Cells and Solid State Chemistry Division, Risø National Laboratory for Sustainable Energy, Technical University of Denmark5
Fuel Cells and Solid State Chemistry Division. Management, Fuel Cells and Solid State Chemistry Division, Risø National Laboratory for Sustainable Energy, Technical University of Denmark6
Optical Microsensors and Micromaterials, Department of Photonics Engineering, Technical University of Denmark7
Department of Photonics Engineering, Technical University of Denmark8
Films of Ce0.9Gd0.1O2-delta (CGO10) are prepared at a range of conditions by pulsed laser deposition (PLD) on a single crystal Si (100) and MgO (100), and on a polycrystalline Pt/MgO (100) substrate. The relationship between the film microstructure, crystallography, chemical composition and PLD processing parameters is studied.
It is found that the laser fluence has no significant impact on the film density, whereas the substrate temperature and the oxygen pressure are of essential importance for the film microstructure development. The reduction of deposition temperature, down to 250 oC, together with a lowered oxygen pressure of 0.05 mbar, significantly inhibits the growth of columnar structures.
Further decrease in oxygen pressure, to 0.005 mbar, promotes films densification, but a stress build-up is observed and leads to a lattice-parameter enlargement of the coatings. The chemical films composition is affected by the applied fluence. At a low fluence, 0.5 J/cm², a congruent transfer is obtained while a relative Gd enrichment results for substantially higher (3.5-5.5 J/cm²).
Language: | English |
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Year: | 2010 |
Pages: | 511-517 |
ISSN: | 18417132 and 14544164 |
Types: | Journal article |
ORCIDs: | Pryds, Nini , Linderoth, Søren and Schou, Jørgen |