Journal article
MEMS Bragg grating force sensor
Department of Micro- and Nanotechnology, Technical University of Denmark1
MEMS-AppliedSensors Group, MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark3
Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark4
We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh environments and for remote and distributed sensing and has a measured sensitivity of -14 nm/N, which is several times higher than what is obtained in conventional fiber Bragg grating force sensors. © 2011 Optical Society of America.
Language: | English |
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Year: | 2011 |
Pages: | 19190-19198 |
ISSN: | 10944087 |
Types: | Journal article |
DOI: | 10.1364/OE.19.019190 |
ORCIDs: | Thomsen, Erik Vilain and Hansen, Ole |