Conference paper
Circular Piezoelectric Accelerometer for High Band Width Application
An uniaxial bulk-micromachined piezoelectric MEMS accelerometer intended for high bandwidth application is fabricated and characterized. A circular seismic mass (radius = 1200 ¿m) is suspended by a 20 ¿m thick annular silicon membrane (radius = 1800 ¿m). A 24 ¿m PZT screen printed thick film is used as the sensing material on top of the silicon membrane.
Accelerations in the out of plane direction induce a force on the seismic mass bending the membrane and a potential difference is measured in the out of plane direction of the stressed PZT. A resonance frequency of 23.50 kHz, a charge sensitivity of 0.23 pC/g and a voltage sensitivity of 0.24 mV/g are measured.
Language: | English |
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Publisher: | IEEE |
Year: | 2009 |
Pages: | 475-478 |
Proceedings: | 8th IEEE Conference on Sensors |
ISBN: | 1424445485 , 1424453356 , 9781424445486 and 9781424453351 |
ISSN: | 21689229 and 19300395 |
Types: | Conference paper |
DOI: | 10.1109/ICSENS.2009.5398277 |
ORCIDs: | Thomsen, Erik Vilain |