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Conference paper

TiO2 and Al2O3 ALD Grown Multilayers for Subwavelength Photonics

In Book of Abstracts. Dtu's Sustain Conference 2015 — 2015

By Shkondin, Evgeniy1; Jensen, Flemming1; Lavrinenko, Andrei2,3; Mar, Mikkel Dysseholm1; Larsen, Pernille Voss1; Malureanu, Radu2,3; Zhukovsky, Sergei V.2,3; Andryieuski, Andrei A.2,3; Takayama, Osamu2,3

From

DTU Danchip, Technical University of Denmark1

Department of Photonics Engineering, Technical University of Denmark2

Metamaterials, Department of Photonics Engineering, Technical University of Denmark3

Language: English
Publisher: Technical University of Denmark
Year: 2015
Proceedings: DTU Sustain Conference 2015
Types: Conference paper
ORCIDs: Shkondin, Evgeniy , Jensen, Flemming , Lavrinenko, Andrei , Mar, Mikkel Dysseholm , Malureanu, Radu , Andryieuski, Andrei A. and Takayama, Osamu

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