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title:(X-ray AND lattice AND strain AND determination AND in AND surface AND layers)

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1 Book chapter

X-ray lattice strain determination in surface layers

Somers, Marcel A. J.; Pantleon, Karen

Karakteriserimg Af Materialer - Fra Atom Til Makro — 2002

Year: 2002

Language: English

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2 Conference paper

X-ray lattice strain determination in surface layers

Somers, Marcel A.J.; Pantleon, Karen

Dansk Metallurgisk Selskabs Vintermøde 2002 — 2002

The present article describes several aspects of lattice strain determination in surface layers by means of X-ray diffraction analysis. Several possibilities and the origins of stress in surface layers are illustrated by the following three cases: 200 nm thick Mo layers on glass substrates; 5.5

Year: 2002

Language: English

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