Conference paper
Microfabrication of grating for X-ray phase contrast imaging
DTU Danchip, Technical University of Denmark1
Department of Micro- and Nanotechnology, Technical University of Denmark2
Silicon Microtechnology, Department of Micro- and Nanotechnology, Technical University of Denmark3
Technical University of Denmark4
Department of Physics, Technical University of Denmark5
Neutrons and X-rays for Materials Physics, Department of Physics, Technical University of Denmark6
Surface Physics and Catalysis, Department of Physics, Technical University of Denmark7
Language: | English |
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Publisher: | Technical University of Denmark |
Year: | 2017 |
Proceedings: | DTU Sustain 2017 |
Types: | Conference paper |
ORCIDs: | Silvestre, Chantal , Hemmingsen, Jens H. and Hansen, Ole |