Conference paper
System-Level Modelling and Simulation of MEMS-Based Sensors
Computer Science and Engineering, Department of Informatics and Mathematical Modeling, Technical University of Denmark1
Department of Informatics and Mathematical Modeling, Technical University of Denmark2
MicroNano Tribology and Modeling, Department of Micro- and Nanotechnology, Technical University of Denmark3
Department of Micro- and Nanotechnology, Technical University of Denmark4
The growing complexity of MEMS devices and their increased used in embedded systems (e.g., wireless integrated sensor networks) demands a disciplined aproach for MEMS design as well as the development of techniques for system-level modeling of these devices so that a seamless integration with the existing embedded system design methodologies is possible.
In this paper, we present a MEMS design methodology that uses VHDL-AMS based system-level model of a MEMS device as a starting point and combines the top-down and bottom-up design approaches for design, verification, and optimization. The capabilities of our proposed design methodology are illustrated through the design of a microaccelerometer.
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2005 |
| Pages: | 1-6 |
| Proceedings: | 9th IEEE International Multi Topic Conference |
| ISBN: | 0780394291 , 9780780394292 , 0780394305 and 9780780394308 |
| Types: | Conference paper |
| DOI: | 10.1109/INMIC.2005.334503 |
| ORCIDs: | Madsen, Jan |
MEMS Microaccelerometer Reduced-Order Model Sensors SystemC VHDL-AMS Wireless Sensor Networks ystem-Level Model
Computational modeling Design methodology Design optimization Embedded system IEEE standards MEMS-based sensors Mathematical model Microelectromechanical devices Micromechanical devices Reduced order systems Sensor systems Wireless sensor networks bottom-up MEMS design circuit optimisation circuit simulation embedded systems hardware description languages microaccelerometer microsensors optimization system-level modeling top-down MEMS design
