Boolean:	`(bicycle AND helmet) OR (head AND protection)` (always group AND in parenthesis)
Title:	`title:(climate change)`
Author:	`author:("bohr niels" OR "bohr n")` (avoid only full first name)
Phrase:	`"water pump control"` (does not work with wildcards)
Wildcards:	`wom?n pharm*`

Conference paper

Fabrication of Cantilevers by NIL

In In Proceeding of "international Workshop on Nanomechanical Cantilever Sensors" — 2008

From

Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark¹

NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark²

Department of Micro- and Nanotechnology, Technical University of Denmark³

Nanophotonic Devices, Department of Photonics Engineering, Technical University of Denmark⁴

Department of Photonics Engineering, Technical University of Denmark⁵

NSE-Optofluidics Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark⁶

Quantum and Laser Photonics, Department of Photonics Engineering, Technical University of Denmark⁷

Abstract

Language:	English
Publisher:	Max Planck Institute for Polymer Research
Year:	2008
Proceedings:	International Workshop on Nanomechanical Cantilever Sensors
Types:	Conference paper
ORCIDs:	Keller, Stephan Urs , Kristensen, Anders , Yvind, Kresten , Hvam, Jørn Märcher and Boisen, Anja