Conference paper
Sub-micrometer waveguide for nano-optics
With the recent progress within the field of processing nano structures, there is an increasing interest in coupling light into such structures both for characterization of optical properties and new optical components. In this work we propose the use of a sub-micrometer planar waveguide for probing the reflection of light against a nano structure.
The planar waveguide is based on a silicon nitride core layer, surrounded by a silica cladding region. In our design we utilize this waveguide to couple light into a nano-structure.
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2003 |
| Pages: | 696 |
| Proceedings: | 2003 Conference on Lasers and Electro-Optics Europe |
| ISBN: | 0780377346 and 9780780377349 |
| Types: | Conference paper |
| DOI: | 10.1109/CLEOE.2003.1313762 |
| ORCIDs: | Rottwitt, Karsten |
Optical coupling Optical devices Optical planar waveguides Optical reflection Optical waveguides Planar waveguides Probes Refractive index SiN SiO/sub 2/ Silicon compounds Waveguide theory light coupling light propagation nano-optics nanotubes optical couplers optical design techniques optical planar waveguides silica cladding region silicon compounds silicon nitride core layer submicrometer planar waveguide
