Conference paper
An electrochemical-cantilever platform for hybrid sensing applications
Department of Micro- and Nanotechnology, Technical University of Denmark1
Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark3
This work presents a fully-functional, microfabricated electrochemical-cantilever hybrid platform with flow control. A new cantilever chip format is designed, fabricated, and mounted in a custom polymer flow cell. Issues such as leakage and optical/electrical access are addressed, and combined mechanical and electrochemical performance is investigated.
Lastly, a cantilever is “defunctionalized” in situ to create a reference cantilever for differential measurements in detection of Cu2+ ions at concentrations of 10 μM and 100 nM.
Language: | English |
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Publisher: | IEEE |
Year: | 2011 |
Pages: | 833-836 |
Proceedings: | 24th International Conference on Micro Electro Mechanical Systems |
ISBN: | 1424496322 , 9781424496327 , 1424496349 and 9781424496341 |
ISSN: | 10846999 |
Types: | Conference paper |
DOI: | 10.1109/MEMSYS.2011.5734554 |
ORCIDs: | Boisen, Anja |
Copper Electric potential Electrodes Ions Sensors Stress Stress measurement cantilever chip format cantilevers custom polymer flow cell differential measurements electrochemical analysis electrochemical-cantilever platform flow control hybrid sensing applications microfabrication micromechanical devices reference cantilever