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Conference paper

Extraction of a linearly distributed focused ion beam from a matrix-ECR plasma produced in reactive gases

In Proceedings — 2011, pp. 59-60

By Stamate, Eugen1,2

From

Plasma Physics and Technology Programme, Risø National Laboratory for Sustainable Energy, Technical University of Denmark1

Risø National Laboratory for Sustainable Energy, Technical University of Denmark2

Language: English
Year: 2011
Pages: 59-60
Proceedings: 33rd International Symposium on Dry Process
ISBN: 4863482167 and 9784863482166
Types: Conference paper
ORCIDs: Stamate, Eugen

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