Conference paper
Hollow core MOEMS Bragg grating microphone for distributed and remote sensing
We present the design and fabrication of a completely new high sensitivity all-optical frequency modulated MOEMS microphone for distributed and remote sensing applications. Due to immunity to electromagnetic interference, no parasitic capacitances and easy wavelength division multiplexing (WDM) combined with the low transmission loss of modern optical fibers [1], frequency modulated optical sensors are ideal for remote and distributed sensing.
While several all-optical and high sensitivity MOEMS pressure sensors are found in literature, these sensors are typically based on amplitude (intensity) modulation. Amplitude modulation is inherently sensitive to transmission loss and requires a unique transmission line for each sensor. Though fiber Bragg gratings (FBGs) are based on frequency modulation the relatively large dimensions of optical fibers and their low refractive index modulation makes them most suitable for high stress sensing, e.g. in structural health monitoring.
The MOEMS microphone presented here has a calculated static pressure sensitivity approximately 104 times larger than conventional FBGs [2,3].
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2011 |
| Pages: | 586-589 |
| Proceedings: | 16th International Solid-State Sensors, Actuators and Microsystems Conference |
| Journal subtitle: | 16th International Solid-state Sensors, Actuators and Microsystems Conference |
| ISBN: | 145770157X , 145770157x , 9781457701573 , 1457701553 , 1457701561 , 9781457701559 and 9781457701566 |
| Types: | Conference paper |
| DOI: | 10.1109/TRANSDUCERS.2011.5969722 |
| ORCIDs: | Thomsen, Erik Vilain and Hansen, Ole |
Bragg gratings Optical fiber sensors Optical waveguides Refractive index Temperature sensors
Bragg grating MOEMS pressure sensors Optical sensing condition monitoring distributed sensing distributed sensors fiber Bragg gratings fibre optic sensors frequency modulated optical sensors frequency modulation high sensitivity all optical frequency modulated MOEMS microphone hollow core MOEMS Bragg grating microphone low transmission loss micro-optomechanical devices microphone microphones optical fibers optical modulation pressure sensors remote sensing static pressure sensitivity stress measurement stress sensing structural engineering structural health monitoring wavelength division multiplexing
