Conference paper
High-Confinement, High-Q Microring Resonators on Silicon Carbide-On-Insulator (SiCOI)
Nanophotonic Devices, Department of Photonics Engineering, Technical University of Denmark1
Centre of Excellence for Silicon Photonics for Optical Communications, Centers, Technical University of Denmark2
Diode Lasers and LED Systems, Department of Photonics Engineering, Technical University of Denmark3
Department of Photonics Engineering, Technical University of Denmark4
Chinese Academy of Sciences5
DTU Danchip, Technical University of Denmark6
We realize silicon carbide-on-insulator platform based on crystalline 4H SiC and demonstrate high confinement SiC resonators with sub-micron waveguide cross-sectional dimension. The obtained Q (57,000) is the highest Q reported for SiC microring resonators.
Language: | English |
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Publisher: | IEEE |
Year: | 2018 |
Pages: | 1-3 |
Proceedings: | 2018 Asia Communications and Photonics Conference<br/> |
ISBN: | 1538655195 , 1538661578 , 1538661586 , 9781538655191 , 9781538661574 and 9781538661581 |
Types: | Conference paper |
DOI: | 10.1109/ACP.2018.8595751 |
ORCIDs: | Pu, Minhao , Chang, Bingdong and Ou, Haiyan |
(190.4390) Nonlinear optics, integrated optics (230.0230) Optical devices (230.5750) Resonators Frequency conversion Optical waveguides Photonics Q-factor SiC Silicon Silicon carbide crystalline 4H SiC high-confinement high-Q microring resonators integrated optics micro-optomechanical devices micromechanical resonators optical resonators optical waveguides silicon carbide-on-insulator platform silicon compounds submicron waveguide cross-sectional dimension wide band gap semiconductors