Conference paper
Cantilever-based bio-chemical sensor integrated in a microliquid handling system
Department of Micro- and Nanotechnology, Technical University of Denmark1
NSE-Optofluidics Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark3
Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark4
The cantilevers have integrated piezoresistive readout which, compared to optical readout, enables simple measurements on even non-transparent liquids, such as blood. First, we introduce a simple theory for using piezoresistive cantilevers as surface stress sensors. Then, the sensor fabrication based on conventional microfabrication is described and the sensor characterization is discussed.
During the characterization we found a stress sensitivity of (ΔR/R)=4.6:10 -4 (N/m)-1 and a minimum detectable surface stress change of 2.6 mN/m. Aqua regia etch of gold on top of the cantilevers has been monitored, and immobilization of single-stranded thiol modified DNA-oligos has been detected by the sensor.
Finally, it is demonstrated that it is possible to analyze two samples simultaneously by utilizing the laminar flow in the microliquid handling system.
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2001 |
| Pages: | 401-404 |
| Proceedings: | 14th IEEE International Conference on Micro Electro Mechanical Systems |
| ISBN: | 0780359984 and 9780780359987 |
| ISSN: | 10846999 |
| Types: | Conference paper |
| DOI: | 10.1109/MEMSYS.2001.906561 |
| ORCIDs: | Marie, Rodolphe and Boisen, Anja |
Biomedical optical imaging Biosensors Blood DNA Integrated optics Liquids Optical device fabrication Optical sensors Piezoresistance Sensor phenomena and characterization Stress biosensors blood cantilever-based bio-chemical sensor immobilization laminar flow microfluidics microliquid handling system microsensors minimum detectable surface stress change nontransparent liquids piezoresistive cantilevers piezoresistive devices piezoresistive readout sensor characterization sensor fabrication single-stranded thiol modified DNA-oligos stress sensitivity surface stress sensors
