Conference paper
Intrinsic Low Hysteresis Touch Mode Capacitive Pressure Sensor
Department of Micro- and Nanotechnology, Technical University of Denmark1
Silicon Microtechnology Group, MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark3
Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark4
Center for Nanoteknologi, Centers, Technical University of Denmark5
Hysteresis has always been one of the main concerns when fabricating touch mode capacitive pressure sensors (TMCPS). This phenomenon can be fought at two different levels: during fabrication or after fabrication with the aid of a dedicated signal conditioning circuit. We will describe a microfabrication step that can be introduced in order to reduce drastically the hysteresis of this type of sensors without compromising their sensitivity.
Medium-high range (0 to 10 bar absolute pressure) TMCPS with a capacitive signal span of over 100pF and less than 1 % hysteresis in the entire pressure range have been obtained. Temperature characterization was performed and showed a decrease in capacitance as the temperature increases. The maximum output variation, relative to room temperature, has been found to be 0.15 %/°C at 80 °C, while an almost constant variation of 0.044 %/°C is achieved if working in the touch mode region.
Language: | English |
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Publisher: | IEEE |
Year: | 2011 |
Pages: | 2279-2282 |
Proceedings: | 2010 IEEE Sensors |
ISBN: | 1424481686 , 1424481694 , 1424481708 , 9781424481682 , 9781424481699 and 9781424481705 |
ISSN: | 21689229 and 19300395 |
Types: | Conference paper |
DOI: | 10.1109/ICSENS.2010.5690722 |
ORCIDs: | Pedersen, Thomas , Hansen, Ole and Thomsen, Erik Vilain |