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Interpreted as:
title:(Towards AND a AND microscopic AND understanding AND of AND plasma AND activated AND bonding)
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Towards a microscopic understanding of plasma activated bonding
Semiconductor Wafer Bonding 7: Science, Technology, and Applications — 2004, pp. 248-258
Year: 2004
Language: English
Towards a microscopic understanding of plasma activated bonding (poster)
Year: 2003
Language: English