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title:(Towards AND a AND microscopic AND understanding AND of AND plasma AND activated AND bonding)

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1 Conference paper

Towards a microscopic understanding of plasma activated bonding

Poulsen, M.; Egebjerg, A.; Bunk, O.; Nielsen, M.; Nielsen, M.M.; Feidenhans'l, R.; et al. (1 more)

Semiconductor Wafer Bonding 7: Science, Technology, and Applications — 2004, pp. 248-258

Year: 2004

Language: English

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2 Conference paper

Towards a microscopic understanding of plasma activated bonding (poster)

Year: 2003

Language: English

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