Conference paper
Micro-cantilevers for non-destructive characterization of nanograss uniformity
Nanointegration Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark1
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Micro- and Nanotechnology, Technical University of Denmark3
CAPRES A/S4
We demonstrate an application of three-way flexible micro four-point probes for indirect uniformity characterization of surface morphology. The mean sheet conductance of a quasi-planar 3D nanostructured surface is highly dependent on the surface morphology, and thus accurate sheet conductance measurements may be useful for process uniformity characterization.
The method is applied for characterization of TiW coated nanograss uniformity. Three-way flexible L-shaped cantilever electrodes are used to avoid damage to the fragile surface, and a relative standard deviation on measurement repeatability of 0.12 % is obtained with a measurement yield of 97%. Finally, variations in measured sheet conductance are correlated to the surface morphology as characterized by electron microscopy.
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2011 |
| Pages: | 1060-1063 |
| Proceedings: | 16th International Solid-State Sensors, Actuators and Microsystems Conference |
| ISBN: | 1457701553 , 1457701561 , 145770157X , 145770157x , 9781457701559 , 9781457701566 and 9781457701573 |
| Types: | Conference paper |
| DOI: | 10.1109/TRANSDUCERS.2011.5969173 |
| ORCIDs: | Petersen, Dirch Hjorth , Bøggild, Peter , Hansen, Ole and Mølhave, Kristian |
Four-point probe Nanograss Non-destructive contact Static contact TiW Tribology cantilevers electric admittance measurement electrical conductivity electrodes electron microscopy indirect uniformity characterization mean sheet conductance metallic thin films microcantilevers micromechanical devices nanograss uniformity nanostructured materials nondestructive characterization nondestructive testing quasi-planar 3D nanostructured surface scanning electron microscopy sheet conductance measurements surface morphology thin films three-way flexible L-shaped cantilever electrodes three-way flexible microfour-point probes titanium alloys tungsten alloys
